Method for producing a radiation-sensitive composition and low molecular weight compounds used therein

(A) decomposes the acid-dissociable group which promotes solubility in an alkaline developer under the action of acid, and an actinic ray or radiation radiation-sensitive acid generating group which generates an acid upon irradiation, respectively in one molecule having one or more, and low molecular weight compounds polystyrene reduced number average molecular weight by gel permeation chromatography (GPC) (Mn) is a 500 to 4,000, a radiation-sensitive composition containing a (B) a solvent.