Polymer microcantilevers for thermal sensing
2011
We present a polymer thermal bimorph microcantilever with integrated gold actuator and sensor. Our device reports an enhanced direct thermal response, and 30% increase in sensitivity compared to prior devices using NiChrome sensor. Releasing the cantilever from the substrate enhanced the response by a factor of 200, suggesting this technique to be advantageous over embedded ‘hot wire’ methods for sensing fluid thermal properties.
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