In-situ pulsed laser deposition of high-T sub c YBa sub 2 Cu sub 3 O sub 7 superconducting thin films on (100) LaA103 substrates

The formation of superconducting thin films on lanthanum aluminate substrates is very important for high-frequency applications. In this paper, we discuss the fabrication of epitaxial superconducting YBa{sub 2}Cu{sub 3}O{sub 7} thin films on (100)LaAlO{sub 3} substrates, which exhibit excellent dielectric properties required for high frequency applications. The films were deposited by the biased pulsed laser evaporation technique (PLE) at substrate temperatures between 500--650{degree}C and exhibit excellent crystallinity with best minimum ion channeling yields corresponding to approximately 3%. The superconducting transition temperatures varied from 88--92 K with critical current densities at 77K and zero magnetic field greater than 4 {minus} 5 {times} 10{sup 6} Amps/cm{sup 2}.