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Formation of germanide using flash lamp annealing (FLA) and influence of annealing on active impurities
Formation of germanide using flash lamp annealing (FLA) and influence of annealing on active impurities
2021
Hideaki Tanimura
Hikaru Kawarazaki
Shinichi Kato
Ryota Wada
Takahiro Higuchi
Tsutomu Nagayama
Takashi Kuroi
Keywords:
Germanide
Materials science
Flash-lamp
Chemical engineering
Diffusion
annealing
Impurity
Correction
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