Effects of detector characteristics on the phase measurement in quasi-heterodyne reference-beam ESPI
1993
This paper describes the statistical distribution of metrological fields and the phase measurement method in quasi-heterodyne reference-beam ESPI under limited detector resolution. The effects of resolution, electronic noise, intensity saturation, and the quantization error on the phase measurement are discussed. The limitation of non-linearity of the detector to the phase extraction is also investigated.
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