Control system for radio frequency power of etching machine

The utility model discloses a control system for the radio frequency power of an etching machine, which comprises the following components: a control unit, a switch controller, a radio frequency power supply, a preheating setting machine, a power output unit and a high-frequency exciting device. The control unit, the radio frequency power supply, the power output and the high-frequency exciting device are successively connected. The switch controller is provided between the control unit and the radio frequency power supply. The preheating setting machine is provided between the radio frequency power supply and the power output unit. The control system furthermore comprises a feedback device which is used for feeding back an output value of the radio frequency power. The power output unit, the feedback device and the control unit are successively connected for forming a closed-loop control link. The control system for the radio frequency power of an etching machine can detect the value of the radio frequency power and feeds back an abnormity signal when the radio frequency power is abnormal.