Laser additive manufacturing using nanofabrication by integrated two-photon polymerization and multiphoton ablation

Modern three-dimensional micro-/nanofabrication requires both additive and subtractive processes. However, these two processes are largely isolated and generally regarded as incompatible with each other. In this chapter we introduce both additive two-photon polymerization and subtractive multiphoton ablation techniques and accomplished simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond laser multiphoton ablation. Submicron polymer fibers containing periodic holes (500-nm diameter) and microfluidic channels (1-μm diameter) were successfully fabricated. This method combining both two-photon polymerization and femtosecond laser ablation enables the fabrication of complex three-dimensional micro-/nanostructures and is promising for a wide range of applications such as integrated optics, microfluidics, and microelectromechanical systems.