Measuring the electric impedances of ZnO piezoelectric elements intended to excite elastic waves at a frequency of about 10 GHz

The choice of a design for an excitation system intended to measure the impedances of piezoelectric elements at frequencies around 10 GHz is explained. The technique is briefly described for the manufacture of piezoelectric elements based on Al and Zn films, capable of exciting transverse elastic waves in Y 3 Al 5 O 12 . A procedure is set forth for measuring the impedances of piezoelectric elements, which is an extension of the two-port technique to microwave frequencies. Results of a study into transverse elastic wave piezoelectric transducers at 8.7 GHz are reported and compared with theory.