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Correlation between Stacking Faults in Epitaxial Layers of 4H-SiC and Defects in 4H-SiC Substrate
Correlation between Stacking Faults in Epitaxial Layers of 4H-SiC and Defects in 4H-SiC Substrate
2019
Yu Guo
Tong-Hua Peng
Chun Jun Liu
Zhan wei Yang
Zhen-Li Cai
Keywords:
Epitaxy
Materials science
Composite material
Substrate (chemistry)
Stacking
sic substrate
Correction
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