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SiC/SiCバッファ層/AlN/Si(110)多層構造におけるSiCバッファ層形成条件の検討
SiC/SiCバッファ層/AlN/Si(110)多層構造におけるSiCバッファ層形成条件の検討
2018
tomo kei nara
asahi kudou
hinode ki nakazawa
Keywords:
Silicon carbide
Pulsed laser deposition
Composite material
Materials science
Optoelectronics
Correction
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