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B- and Al- Doped Delta Layers in Si Using Halogen-Based Precursors.
B- and Al- Doped Delta Layers in Si Using Halogen-Based Precursors.
2020
Sungha Baek
A. Farzani
Matthew S. Radue
Quinn Campbell
Kevin Dwyer
Andrew Baczewski
Yifei Mo
Shashank Misra
R.E. Butera
Keywords:
Doping
Materials science
Halogen
Delta
Crystallography
Correction
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