A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure

This paper proposed a silicon resonant accelerometer (SRA) with vibrating beam integrated with comb fingers sensing structure. The combination of vibrating beam and sensing combs enables additional mass normally used in conventional design not being required, which enhances the sensitivity and ability of anti-vibration by increasing the resonant frequency. The modal frequency analysis of accelerometer is performed with COMSOL. The simulation results show a close agreement to the test results of nominal frequency 93038 Hz. The sensitivity of the SRA achieves 223.7 Hz/g with nonlinearity of 5.1‰ over the measurement range of ± 1 g.