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Analysis of Focused Ion Beam Trenches in Si for Nanofluidics Applications
Analysis of Focused Ion Beam Trenches in Si for Nanofluidics Applications
2002
Arthur P. Baddorf
G. W. Ownby
A. B. Hmelo
R.A. Weller
Keywords:
Optoelectronics
Nanofluidics
Materials science
Focused ion beam
Correction
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