Titanium dioxide thin films prepared by seeded supersonic beams for gas sensing applications

Abstract This paper reports on the preparation, surface and electrical characterisation of titanium dioxide thin-films for highly selective gas sensor devices. Seeded supersonic beam deposition technique was used to prepare nanostructured thin films for gas sensors application. Two different typologies of sensors, prepared under different deposition conditions, were investigated. They showed gas-sensing properties comparable to most of the TiO 2 films realised with other more conventional techniques.