High efficiency end-fire 3-D optical phased array based on multi-layers SiN/SiO platform
2021
OPA device has been widely studied for solid-state Lidar. We have investigated a multi-layers SiN/SiO structure to end-fire the beam with high efficiency. The advantage of the structure, simulation result and fabrication feasibility are discussed. In addition, the latest fabrication progress is also presented.
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