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A Numerical Study on the Flow Uniformity according to Chamber Shapes Used for Test of the Semi-Conductor Chip
A Numerical Study on the Flow Uniformity according to Chamber Shapes Used for Test of the Semi-Conductor Chip
2020
Daegyu Lee
Sang-Bum Ma
Sung Kim
Jeong-Yeol Kim
Chaedong Kang
Jin-Hyuk Kim
Keywords:
Flow (psychology)
Computational fluid dynamics
Mechanics
Semiconductor
Materials science
Chip
Correction
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