Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb

We present ultra-precision distance measurement based on spectral interferometer via single soliton microcomb generated in Si3N4 microresonator. We demonstrate 3-nm repeatability over a 23-mm non-ambiguity range via homodyne interferometry, over 1000s long-term stability.