Simulation on the TRL Calibration of a MEMS Filter using MEMS Micro-coaxial Probe

In this paper, an on-wafer S-parameter calibration method and a complete set of TRL calibration kits are presented. Both the calibration kits as well as the micro coaxial probes are designed based on a MEMS process. An eight-term error model is used to do the calibration and the calibration process is performed using the EM full wave simulation software. Moreover, we design these calibration kits and the micro-coaxial probes in order to verify some experimental results from our previous work, that the crossover effect between the probes as well as the surface wave degraded the measured rejection of a W band MEMS filter. As a result, the simulation results fit the measured result well, demonstrating the validity of the probes and the kits design, future work can be delegated to the design of more sophisticated calibration kits and algorithms to alleviate the aforementioned problems.