Electrode configurations for layered-plate piezoelectric micro-actuators

This paper investigates piezoelectric micro-actuators with different electrode configurations, i.e., interdigital, spiral and radial electrodes. Using the finite element method, electromechanical performance is evaluated and a comparison of the different micro-actuators is made for equal field strengths. Then, the actuators are considered for tunable lenses and optical parameters are estimated using ray tracing. The interdigital-electrode configuration performs best in both electromechanical and optical analysis. Display Omitted Piezoelectric micro-actuator's bending with different electrode configurationsInterdigital configuration give better mechanical performance than other spiral configurations.Interdigital configuration give better optical performance than other spiral configurations.For each configuration, the highest bending curvature does not ensure for the minimum F-number.