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Preparation of Hard Coat ings by Plasma Chemical Vapor Deposition
Preparation of Hard Coat ings by Plasma Chemical Vapor Deposition
1988
Shizuka Yamaguchi
Masatake Fukushima
Masayuki Doi
Naotatsu Asahi
Keywords:
Chemical vapor deposition
Plasma
Coat
Materials science
Inorganic chemistry
Chemical engineering
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