Nano composite stacked phase-change film and preparation method and application thereof

The invention relates to a nano composite stacked phase-change film and a preparation method and an application thereof. Ge2Sb2Te5 films and ZnSb films are arranged alternately into a stacked film unit, wherein each Ge2Sb2Te5 film is 15-35nm thick, and each ZnSb film is 15-35nm thick. The stacked film unit formed by alternate arrangement is of a one-layer structure, and can be applied to a phase-change memory with multistage storage characteristic. Compared with the prior art, the nano composite stacked phase-change film has two stable phase change processes and three storage modes, and the storage density of PCRAM can be greatly improved; and the crystallization temperature and the ten-year data holding temperature are high, and the thermal stability of PCRAM can be greatly improved.