High-quality hexagonal ZnO crystals grown by chemical vapor deposition

Abstract High-quality zinc oxide (ZnO) crystals were grown on a (0001) sapphire substrate by chemical vapor deposition at 830 °C under atmospheric pressure. The hexagonal crystals had an average diameter of about 150 μm, and a thickness of about 15 μm, as observed under a polarizing microscope. The large (0002) facet was flat, regular, and neat. In the X-ray diffraction pattern, strong (0002) and weak (0004) peaks indicate that the crystals had a wurtzite structure. The crystalline quality was characterized by Raman scattering, and the E 2 (high), E 2 (low), and A l (LO) modes confirm the high quality of the ZnO crystals. Photoluminescence (PL) spectra of the crystals had a strong and sharp ultraviolet emission peak at 379 nm. The PL mechanism was also discussed.