Quantitative Characterization of Platinum Diselenide Electrical Conductivity With an Inverted Scanning Microwave Microscope

Near-field scanning microwave microscopy is a technique with increasing popularity for the study of nanometer-scale electrical properties of samples. Here, we present an approach to quantify sample properties in images obtained with an inverted scanning microwave microscope (iSMM), recently introduced by our group. In particular, this study reports the analysis of the local electrical conductivity of a platinum diselenide sample and proves its semimetal behavior. The approach is validated by a full-wave numerical model, reproducing the complete iSMM operation as well as all steps of the calibration algorithms. To extract local sample properties, this article provides two calibration procedures, respectively, for transmission and reflection mode measurements, based on a two-port equivalent circuit of the iSMM. This enables the high-frequency quantitative characterization of a wide variety of samples and surfaces.