Resonant filters with low loss

Resonance filter (1) composed of silicon for use in the micro and millimeter wave range, which comprises: (A) a first layer (2) with n contiguous resonant cavities, (4) where n is at least 2, and each defined by a partition wall (8) are separated from each other; (B) a second, thinner layer (3) with at least n - 1 coupling cavities (5); characterized in that the cavities (4) of the first layer (2) only as resonance cavities (4) and the second layer (3) are formed exclusively as a coupling cavity (s) (5), and are open on one side, and that the second layer (3) is disposed on the first layer (2) in such a way that the individual resonance cavities (4) of the first layer (2) by means of the or the coupling cavities (5) of the second layer (3) are interconnected, and that the filter (1) is designed as a monolithic component.