Molecular Electronic Transducer Based Tilting Sensors

This paper introduces a tilting sensor based on Molecular Electronic Transducer (MET) technology. By applying electrical potential between two electrodes covered by lithium iodide electrolyte, the output current from the sensor reflects the covered area of electrodes. The continuously change of electrode area with tilting angle is achieved by patterning metal traces on top of a SiO 2 encapsulated silicon wafer. Polydimethylsiloxane (PDMS) is used as the electrolyte chamber which has high bond strength with SiO 2 after the surface treatment with O 2 plasma. The MET tilting sensor achieves a promising performance with a linear range of ± 90°, resolution of 0.184° and time constant of 40s.