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TEM Characterization of Arsenic and Phosphorus Implanted Silicon Devices
TEM Characterization of Arsenic and Phosphorus Implanted Silicon Devices
1997
Lancy Tsung
Hun-Lian Tsai
Alwin Tsao
Makoto Takemura
Keywords:
Materials science
Arsenic
Metallurgy
Phosphorus
Silicon
Correction
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