Process control monitor (PCM) device and monitoring method

The invention provides a process control monitor (PCM) device and a monitoring method, which are applied to short circuit detection between a via hole and a conductive layer in a to-be-detected chip which is fabricated in accordance with pre-designed rules. The PCM device includes: a first conductive layer which is provided with one or a plurality of via holes and a first leading-out terminal which is to be detected; a second conductive layer which is provided with a second leading-out terminal which is to be detected; an intermediate medium layer which is arranged between the first conductive layer and the second conductive layer, wherein the intermediate medium layer is perforated with second via holes which correspond to every first via hole, and the second conductive layer is arranged on the intermediate medium layer and fills the second via hole. The first conductive layer, the second conductive layer, the intermediate medium layer, the first via hole (s) and the second via hole are structured to conform to the pre-designed rules. The PCM device increases the efficiency in determining the presence of short circuit between the via holes and the first conductive layer, and saves cost.