Electro Osmotic Flow Pump Based on the Corbino Disc Geometry

A new EOF pump design is based on the so-called Corbino geometry known from semiconductor physics. Devices were fabricated using parallel glass plates with a spacing of 0.4 μm. When filled with a physiological buffer solution (100 mM KCl), the devices obtained a stall pressure of 500 mbar and a maximum flow rate of 2.5 nl/s at a driving voltage of 100 V.