Trans-scale Nanofabrication with Nanopositioning and Nanomeasuring Machines

Abstract Nanofabrication in macroscopic working areas addresses the manipulation with nanometer precision in large scale working areas of several hundred millimeters. In order to reduce the fabrication time of large objects, high dynamic position tracking is required. The position and orientation of the nanopositioning and nanomeasuring machine have to be controlled permanently to compensate external disturbances like ground motion, sound waves, et cetera. Many applications have strict demands on following the track, e.g. to reduce the line roughness. High performant data and signal processing and efficient control algorithms are required to overcome these challenges. This work presents the nanopositioning and measuring machine as well as the utilized control system. Several scanning and fabrication experiments have been carried out in order to demonstrate the performance of the setup.