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Evolution of the morphology and composition of metal germanosilicide thin films
Evolution of the morphology and composition of metal germanosilicide thin films
2006
Mathieu Bouville
Dong Zhi Chi
David J. Srolovitz
Keywords:
Thin film
Oxide thin-film transistor
Silicon-germanium
Inorganic chemistry
Grain boundary
Materials science
Metal
Morphology (linguistics)
Chemical engineering
Composition (visual arts)
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