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Diffuser micropump structured with extremely flexible diaphragm of 2 micron-thick polyimide film
Diffuser micropump structured with extremely flexible diaphragm of 2 micron-thick polyimide film
2010
Yingwei Liu
H. Komatsuzaki
Z. Duan
Yasushiro Nishioka
Keywords:
Micrometre
Micropump
Diaphragm (structural system)
Polyimide
Materials science
Composite material
Optoelectronics
Correction
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