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X-ray microlithography with a transition radiation source
X-ray microlithography with a transition radiation source
1991
P. Goedtkindt
J. M. Salome
X. Artru
P. Dhez
N. Maene
F. Poortmans
L. Wartski
Keywords:
Optics
Transition radiation
X-ray
Materials science
Correction
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