Carbon nanometer tube nano electronic device and manufacturing method thereof

The present invention provides a method of realizing high performance contact between a carbon nano-tube and a metal electrode, so as to obtain carbon nano-tube nano-electronic device with stable high performance. The nano-electronic device based on the carbon nano-tube adopts scandium metal as an electrode for the connection with the carbon nano-tube. High performance contact can be realized only by connecting the scandium metal with the carbon nano-tube through various micromachining techniques. The method can be used to prepare n-type carbon nano-tube field effect transistors with high performance, and can be used to prepare other various high performance nano-electronic devices based on the carbon nano-tube. The nano-electronic device comprises biological and chemical sensing devices.The method has very important significance for promoting the practical utilization process of the nano-electronic device, and has broad application prospects.