Manufacturing Assessment of SDS3® Gas Upgrade

The deliverable capacity of adsorbent‐based sub‐atmospheric storage and delivery systems for dopant gas is proportional to the storage capacity and low‐pressure flow capability of the adsorbent material. SDS3 is the next generation of adsorbent‐based sub‐atmospheric storage and delivery system for ion implant. A unique higher density adsorbent material is used to provide an increased deliverable capacity.This paper shows how Atmel Corporation, Colorado Springs, Colorado evaluated this new dopant delivery system and verified the increased delivery capacity. The increased deliverable capacity combined with a lower price per gram provides lower operating costs.