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Microresonators with active post-processing gap adjustment
Microresonators with active post-processing gap adjustment
2003
Mika Koskenvuori
Pekka Rantakari
J. Väisäsvaara
I. Tittonen
A. Mattila
Aarne Oja
Ville Kaajakari
H Seppä
H. Kattelus
J. Kiihamaki
Keywords:
Micromechanics
Composite material
Ceramic materials
Materials science
Correction
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