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Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition
2020
Taher Abu Ali
Julian Pilz
Philipp Schäffner
Markus Kratzer
Christian Teichert
Barbara Stadlober
Anna Maria Coclite
Keywords:
Chemical engineering
Atomic layer deposition
zinc oxide thin films
Plasma
Piezoelectricity
Materials science
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