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Quick deposition of various thin films by intense pulsed ion beam
Quick deposition of various thin films by intense pulsed ion beam
1990
Masugata
Sonegawa
Ohashi
Hoshino
Shimotori
Furuuchi
Yamamoto
Ono
Mito
Sato
Hatsushika
Suzuki
Takaai
Yatsui
Keywords:
Optoelectronics
Anode
Ion beam
Deposition (chemistry)
Thin film
Materials science
Correction
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