CMOS-MEMS CAPACITIVEHUMIDITY SENSOR

Thispaperreports a methodforimproving the sensitivity ofintegrated capacitive chemical sensors by removing theunderlying substrate. Thesensor is integrated withCMOS testing electronics using mask-less post-processing followed byinkjet deposition ofsensitive polymer. Thistechnique isdemonstrated withahumidity sensor butcould beusedforother types ofanalytes. The measured sensitivity is0.18%change incapacitance per percent relative humidity, afactor offourimprovement overprevious integrated capacitive sensors.