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Effects of Post-Deposition Annealing Time in Forming Gas Ambient on Y2O3 Films Deposited on Silicon Substrate
Effects of Post-Deposition Annealing Time in Forming Gas Ambient on Y2O3 Films Deposited on Silicon Substrate
2020
Way Foong Lim
Kuan Yew Cheong
Zainuriah Hassan
Hock Jin Quah
Keywords:
Forming gas
Materials science
Deposition (law)
Chemical engineering
Substrate (chemistry)
Annealing (metallurgy)
Silicon
Correction
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