Method for improving the resolution STEM images

The present invention relates to a method for generating signals in the imaging of samples by means of a particle-optical apparatus (401) comprising a detector (417), the picture with the aid of a rastered over the sample beam transmissive particles takes place, and the method comprising the steps of: - generating a particle probe (101) is focused onto the transparent particles for this sample (102) - grid of the particle probe on the sample, said plurality of grid positions are approached, so that only a region of the sample is irradiated with the particle probe - mapping (103) the transmitted from this region samples particles on the detector, - detecting (104) so ​​as to obtain a plurality of data points per raster position of the intensity profiles of the particle probe depicted, wherein the intensity profiles are detected spatially resolved per grid position, Store the data