MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid
2015
This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least −90 °C.
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