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Fabrication of Quench Condensed Thin Films Using an Integrated MEMS Fab on a Chip
Fabrication of Quench Condensed Thin Films Using an Integrated MEMS Fab on a Chip
2017
Richard Lally
Jeremy Reeves
Thomas Stark
Lawrence Barrett
David J. Bishop
Keywords:
Thin film
Electronic engineering
Chip
Microelectromechanical systems
Materials science
Quenching
Fabrication
Optoelectronics
Correction
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