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Fabrication of polymeric microstructures with high aspect ratios using shrinkable polystyrene films
Fabrication of polymeric microstructures with high aspect ratios using shrinkable polystyrene films
1997
Xiao-Mei Zhao
Younan Xia
Dong Qin
George M. Whitesides
Keywords:
Polystyrene
Aspect ratio (image)
Microstructure
Materials science
Lithography
Microelectronics
Aspect ratio (aeronautics)
Polymer chemistry
Composite material
Nanotechnology
Fabrication
Correction
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