Influence of Sb doping on optical and structural properties of ZnO by MOCVD

Sb-doped zinc oxide (ZnO) films grown by metal organic chemical vapor deposition (MOCVD) were investigated. The influence of Sb-doping concentration on the optical and structural properties of ZnO was investigated. The deep-level emission was suppressed gradually by Sb doping. The grain size of ZnO was also increased by Sb doping. The reasons for improvement in optical and structural properties of ZnO thin films are also discussed.