Physicochemical properties and morphology of poly-p-xylylene film surfaces☆

Abstract The physicomechanical properties of poly- p -xyleylene films obtained from the gas phase by pyrolytic polymerization of cyclodi- p -xylyene are studied. The effect of the process parameters (sublimation and polymerization temperatures) on the strain-strength properties of poly- p -xyleylene films are established: the tensile stress is changed over the range 25–62 MPa, relative breaking elongation within 18–330%, and Young's modulus within 0.6–1.4 GPa. Excellent mechanical properties are obtained at polymerization temperatures of 0–30°C and at the sublimation temperature of cyclo-di- p -xylylene 120–140°C. Over the range 5–10°C an abrupt change in the breaking elongation is observed. The effect of the process parameters of pyrolytic polymerization on the surface morphology of the poly- p -xylylene films obtained is studied by electron and optical microscopy.