Non-Contact Scanning Nonlinear Dielectric Microscopy Utilizing Higher Order Nonlinear Dielectric Signal

The contact-type scanning nonlinear dielectric microscopy (SNDM) can measure the distribution of linear and nonlinear dielectric properties of insulators with sub-nanometer resolution. SNDM, however, has tip-abrasion problem and this problem is one of the obstacles for the high quality image. In this paper, in order to improve SNDM, we propose a non-contact scanning nonlinear dielectric microscopy (NC-SNDM) which focused on the nonlinear dielectric signal for controlling the non-contact condition. With NC-SNDM technique, topographic and SNDM images were obtained successfully.