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2-D simulations of capacitively coupled RF plasmas: influence of process parameters
2-D simulations of capacitively coupled RF plasmas: influence of process parameters
2003
Tatiana A. Novikova
Billel Kalache
Pavel Bulkin
Khaled Hassouni
Pere Roca i Cabarrocas
Keywords:
Computational chemistry
Boltzmann equation
Computer simulation
Plasma
Chemistry
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