Old Web
English
Sign In
Acemap
>
Paper
>
Simulation of Nitrogen Indiffusion and Its Impact on Silicon Wafer Strength
Simulation of Nitrogen Indiffusion and Its Impact on Silicon Wafer Strength
2021
Timo Müller
Gudrun Kissinger
Dawid Kot
Michael Gehmlich
Michael Boy
Alexander Vollkopf
Andreas Sattler
Alfred Miller
Keywords:
Materials science
rapid thermal annealing
Optoelectronics
Wafer
Nitrogen
Correction
Source
Cite
Save
Machine Reading By IdeaReader
13
References
0
Citations
NaN
KQI
[]