Integrated variable delay MEMS security device

An integrated variable delay MEMS security device comprises an upper agent layer, a security device layer and a lower agent layer which are bonded mutually in sequence. An explosion transmission hole of the security device layer, an upper agent of the upper agent layer and a lower agent of the lower agent layer are arranged in a staggered mode. A centrifugal sliding block of the security device layer is located between the upper agent and the lower agent. The security device layer comprises a silicon substrate layer. A process through hole is manufactured in the center of the silicon substrate layer. A silicon dioxide layer and a movable silicon structure layer are sequentially manufactured in the silicon substrate layer. A recoil mechanism, a centrifugal mechanism and a variable delay mechanism are manufactured in the movable silicon structure layer. The recoil mechanism and the centrifugal mechanism are locked completely through an interlocking groove and an interlocking tooth. The centrifugal mechanism and the variable delay mechanism are locked completely through a delay groove and a delay tooth. The MEMS technology is applied to the security device, and the integrated variable delay MEMS security device has the characteristics of low cost, high intelligence and easy integration.