Direction-dependent RBS channelling studies in ion implanted LiNbO3

Abstract Damage formation in ion implanted LiNbO 3 was studied by Rutherford backscattering spectrometry (RBS) along various directions of the LiNbO 3 crystal. From the results obtained it can be unambiguously concluded that Nb atoms being displaced during ion implantation preferably occupy the free octahedron sites of the LiNbO 3 lattice structure and most likely also form Nb Li antisite defects.